InAs/GaSb infrared superlattice photodiodes doped with...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction

Reexamination Certificate

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C257S028000, C257S431000, C257SE29072

Reexamination Certificate

active

07638791

ABSTRACT:
An improved photodiode and method of producing an improved photodiode comprising doping an InAs layer of an InAs/GaSb region situated on top of an InAs/GaSb:Be superlattice and below an InAs:Si/GaSb regions such that the quantum efficiency of the photodiode increases and dominant dark current mechanisms change from diffusion to band-to-band tunneling as the InAs layer is doped with Beryllium.

REFERENCES:
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patent: 2004/0223528 (2004-11-01), Wortman et al.
(IDS Reference 13) High differential resistance type-II InAs/GaSb superlattice photodiodes for the long-wavelength infrared Andrew Hood, Darin Hoffman, Binh-Minh Nguyen, Pierre-Yves Delaunay, Erick Michel, and Manijeh Razeghi, Appl. Phys. Lett. 89, 093506 (2006), DOI:10.1063/1.2345020.
W.W. Anderson, Tunnel Contribution to Hg1—xCdxTe and Pb1—xSnxTe p-n Junction Diode Characteristics, Infrared Phys., 1980, pp. 353-361, vol. 20.
M.B. Reine, et al., Semiconductors and Semimetals, Chapter 6: Photovoltaic Infrared Detectors, vol. 18, Mercury Cadmium Telluride, 1981, pp. 201-311, Academic Press.
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J.B. Rodriguez et al., MBE growth and characterization of type-II InAs/GaSb superlattices for mid-infrared detection, Journal of Crystal Growth, Jan. 15, 2005, pp. 6-13, vol. 274, Issues 1-2.
G.J. Sullivan et al., Molecular beam epitaxy growth of high quantum efficiency InAs/GaSb superlattice detectors, Journal of Vacuum Science & Technology B, May/Jun. 2005, pp. 1144-1148, vol. 23, No. 3, Papers from the 22nd North American Conference on Molecular Beam Epitaxy.
A. Hood et al., Capacitance-voltage investigation of high-purity InAs/GaSb superlattice photodiodes, Applied Physics Letters, Jan. 30, 2006, pp. 052112-1 to 052112-3, vol. 88, No. 5, American Institute of Physics.
A. Hood et al., High differential resistance type-II InAs/GaSb superlattice photodiodes for the long-wavelength infrared, Applied Physics Letters, Aug. 28, 2006, vol. 89, No. 9, American Institute of Physics.
Binh-Minh Nguyen et al., Very high quantum efficiency in type-II InAs/GaSb superlattice photodiode with cutoff of 12 um, Applied Physics Letters, Jun. 4, 2007, pp. 231108-1 to 231108-3, vol. 90, No. 23, American Institute of Physics.

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