In-tool and out-of-tool protection of extreme ultraviolet...

Details In-tool and out-of-tool protection of extreme ultraviolet... In-tool and out-of-tool protection of extreme ultraviolet...

2004-02-27

2008-08-19

Smith, Duane (Department: 1797)

Gas separation

Combined or convertible

C055SDIG007, C055S486000, C096S155000, C096S132000, C096S059000, C096S066000, C355S072000, C355S053000, C355S073000

Reexamination Certificate

active

07413586

ABSTRACT:
A reticle carrier for an Extreme Ultraviolet (EUV) reticle may include nested grids of electret fibers to provide active protection from contamination without a power supply. The reticle carrier may include in-line sensors for in-situ monitoring of contamination. Grids of electret fibers may also be used in an EUV pellicle.

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Kravtsov, A.G., et al., “Analysis of the polarization state of melt-spun polypropylene fibers”,Journal of Materials Processing Technology, 124(1-2):160-165, Jun. 2002.
Tsai, P.P., et al., “Different electrostatic methods for making electret filters”,Journal of Electrostatics, 54(3-4):333-341, Mar. 2002.
Chauhan, M.M., et al., “Photoresist Outgassing in EUV”,2000 March Meeting: Bulletin of the American Physical Society, 45(1):563, abstract #L36.112, Mar. 2000.
Moors, R., et al., “Electrostatic mask protection for extreme ultraviolet lithography”,Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures, 20(1):316-320, Jan./Feb. 2002.

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