Signals and indicators – Indicators – Element wear type
Reexamination Certificate
2005-10-25
2005-10-25
Fulton, Christopher W. (Department: 2859)
Signals and indicators
Indicators
Element wear type
C116S200000
Reexamination Certificate
active
06957622
ABSTRACT:
An in-situ wear indicator for detecting wear to at least one selected part in a semiconductor manufacturing environment. The indicator is manufactured in a selected material with a selected thickness so that the indicator degrades upon exposure to the semiconductor manufacturing process at a fixed rate relative to the wear of the selected part. The indicator displays a visual indication of wear which is discernible by an automated detection device.
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patent: 5947053 (1999-09-01), Burnham et al.
patent: 6136043 (2000-10-01), Robinson et al.
patent: 6394023 (2002-05-01), Crocker
patent: 2003/0022397 (2003-01-01), Hess et al.
patent: 2003/0040260 (2003-02-01), Andres
Boettcher Gregory S.
Gold Steven B.
Katz Robert P.
Moore Gabriel V.
Bond Schoeneck & King , PLLC
Couson Tania
Fulton Christopher W.
International Business Machiens Corporation
McGuire George R.
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