Optics: measuring and testing – By dispersed light spectroscopy – For spectrographic investigation
Reexamination Certificate
2007-09-11
2007-09-11
Evans, F. L. (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
For spectrographic investigation
C356S326000, C356S328000
Reexamination Certificate
active
10918141
ABSTRACT:
An in-situ spectrograph having a spectrometer module positioned at a reticle plane or at a wafer plane of a photolithography projection system is disclosed. The spectrometer module disperses light projected from an illumination source, and the produced spectrum may be recorded. The spectrum may be recorded using a photodetector or a layer of photoresist. The recorded spectrums produced by illumination sources of a plurality of steppers may be compared, thus providing a comparison of the wavelength characteristics, particularly the wavelength spread and intensity of the light of the illumination sources. A plurality of spectrometer modules may be used to provide a comparison of the central wavelength of light produced by the illumination sources. The absolute wavelength of light produced by an illumination source may be determined using a spectrometer module having a spectrometer grating.
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Evans F. L.
TraskBritt
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