In-situ reticle contamination detection system at exposure...

Details In-situ reticle contamination detection system at exposure... In-situ reticle contamination detection system at exposure...

2007-07-31

2007-07-31

Stafira, Michael P. (Department: 2886)

Optics: measuring and testing

For light transmission or absorption

C356S433000

Reexamination Certificate

active

10858757

ABSTRACT:
A system and method are provided for detecting contaminants or defects on a reticle in-situ. The system and method provide a system that measures the optical transmission through clear areas on a reticle and determines whether the optical transmission of a reticle has been degraded by contaminants or other defects.

REFERENCES:
patent: 6665065 (2003-12-01), Phan et al.
patent: 6844206 (2005-01-01), Phan et al.

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