Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
Patent
1997-06-17
2000-06-06
Strecker, Gerard
Electricity: measuring and testing
Magnetic
With means to create magnetic field to test material
216 86, 32420716, 324226, 324234, 324655, 427 10, 438 13, 438 17, H01L 2166, H01L 2120, H01L 21302, G01B 706
Patent
active
060723130
ABSTRACT:
The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.
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Barbee Steven George
Halperin Arnold
Heinz Tony Frederick
Li Leping
Anderson Jay H.
International Business Machines - Corporation
Mortinger Alison D.
Strecker Gerard
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