Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
Reexamination Certificate
2005-04-26
2005-04-26
Le, N. (Department: 2862)
Electricity: measuring and testing
Magnetic
With means to create magnetic field to test material
C324S202000, C324S207120
Reexamination Certificate
active
06885190
ABSTRACT:
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.
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Fielden John
Johnson, III Walter Halmer
Lee Shing M.
Lehman Kurt R.
Aurora Reena
Beyer Weaver & Thomas LLP
KLA-Tencor Corporation
Le N.
LandOfFree
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