Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Patent
1993-05-07
1994-10-11
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Ion plating or implantation
427529, 427528, 427527, 427523, 427569, 427577, 427596, B05D 306, C23C 1600
Patent
active
053545842
ABSTRACT:
A material growing by deposition is exposed to a low energy beam of ionized dopant. The ion beam energy is sufficient to implant the dopant in the growing surface of the material. This doping method will work well for any dopant that is substantially immobile in the material at the temperature necessary for deposition growth.
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King Roy V.
Schmidt Instruments, Inc.
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