In-situ interferometer arrangement

Details In-situ interferometer arrangement In-situ interferometer arrangement

2007-10-23

2007-10-23

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S067000, C355S053000, C355S052000

Reexamination Certificate

active

11170414

ABSTRACT:
An in-situ interferometer includes an image modifying optic that produces light ray bundles. The light ray bundles are projected onto a reticle with a plurality of measurement fiducials encoded onto a face of the reticle. The measurement fiducials are exposed onto a sensing plane and their locations measured. Aberrations in the projection system are determined from the measurements of the exposed reticles.

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patent: 2002/0171815 (2002-11-01), Matsuyama et al.
Y. Shiode et al., “Method of Zernike Coefficients Extraction for Optics Aberration Measurement”, SPIE, vol. 4691, 2002, pp. 1453-1464.

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