In-situ growth of flourounated superconducting, Y-Ba-Cu-O thin f

Details In-situ growth of flourounated superconducting, Y-Ba-Cu-O thin f In-situ growth of flourounated superconducting, Y-Ba-Cu-O thin f

1991-10-01

1993-03-30

Lusignan, Michael

Compositions: ceramic

Ceramic compositions

505732, 505730, 505785, 427 62, 427314, 427586, B05D 512, B05D 306

Patent

active

051984148

ABSTRACT:
A laser ablation method for forming a fluorinated superconducting Y-Ba-Cu-O thin film on a sapphire substrate is disclosed, which comprises the steps of: (1) depositing a barrier layer of BaAl.sub.2 O.sub.4 on the sapphire substrate; (2) placing the coated substrate and a tagret in a deposition chamber, said target including fluorine, barium, yttrium, copper and oxygen; (3) providing a background atmosphere including at least partial pressure of O.sub.2 within the chamber; (4) heating the coated substrate to a temperature above ambient; (5) laser-ablating the target material onto the heated substrate while controlling the partial pressure of O.sub.2 in said background atmosphere and the temperature of said heated substrate so that the as-deposited thin film on said substrate is superconductive.

REFERENCES:
Roas et al., "Epitaxial growth of YBa.sub.2 Cu.sub.3 O.sub.7-x thin films by a laser evaporation process", Appl. Phys. lett. 53(16) Oct. 1988 pp. 1557-1559.
Inam et al, "As-deposited high Tc and Jc Superconducting thin films made at low temperatures", Appl. Phys. lett. 53(10) Sep. 1988 pp. 908-910.
Politis et al, "Preparation and superconducting properties of La.sub.1.8 Sr.sub.0.2 CuO.sub.4 and YBa.sub.2 Cu.sub.3 O.sub.6.5 ", MRS proceedings of Symposium (Apr. 1987) (Anaheim, Calif.) edited by Gubser et al, pp. 141-143.
Ovshinsky et al, "Superconductivity at 155K", Phys. Rev. letters, vol. 58, No. 24, Jun. 15, 1987 pp. 2579-2581.
DeSantolo et al, "Preparation of high Tc and Jc films of Ba.sub.2 YCu.sub.3 O.sub.7 using laser evaporation of a composite target containing BaF.sub.2 ", Appl. Phys. lett. 52(23) Jun. 1988 pp. 1995-1997.
Garzon et al, "Characterization of Y-Ba-Cu-O superconducting thin films prepared by coevaporation of Y, Cu, and BaF.sub.2 " Appl. Phys. lett. 54(14) Apr. 1989 pp. 1365-1367.
Rautioaho et al, "Studies to prepare superconducting thick films on aluminum oxide and zirconium oxide substrates", Proc. SPIE-Int. Soc. Opt. Eng. 1988 948 (High-Tc Supercond.) pp. 31-36.
Burton et al, "Microstructural investigation of YBa.sub.2 Cu.sub.3 O.sub.7-8 films deposited by laser ablation form BaF.sub.2 /Y.sub.2 O.sub.3 /CuO targets" Proc. of the Conference on the Science and Technology of Thin Film Superconductros (Colorado Springs, Colorado) Nov. 1988 pp. 61-70.
Witanhachchi et al, "Effect of buffer layers on low-temperature growth of mirror-like superconducting thin films on sapphire", Appl. Phys. lett.55(3) Jul. 1989 pp. 295-297.
CA 110 (2):16990 u SC Thick Films Rautioaho et al. 1988.
Matls Science Letts 7(10) (p. 1133-5) "Prep. of c-axis orented SC Films", Kurosawa et al. 1988.
Applied Phys. Letts 54(14) Apr. 3, 1989, Garzon et al., "Charaterization of SC Thin-Film microbridges to microwave irradiation", pp. 1365-1367.

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