Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Producing josephson junction – per se
Patent
1996-07-08
1998-07-07
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Producing josephson junction, per se
505190, 505238, 505702, 427 62, H01L 3924
Patent
active
057768633
ABSTRACT:
A method of in-situ fabrication of a Josephson junction having a laminar structure, the method comprising the steps of: (1) etching a planar substrate to yield a first planar segment, a second planar segment and a ramp segment, the ramp segment connecting the two planar segments at an angle thereto and the substrate having a constantly-decreasing thickness in the ramp segment; (2) depositing a first superconductive layer on the substrate; (3) depositing a non-superconductive layer on the first superconductive layer; and (4) depositing a second superconductive layer on the non-superconductive layer, wherein both the first and second superconductive layers, and the non-superconductive layer are epitaxial with a c-axis in a direction substantially normal to the plane of the first and second planar segments, and the layers are of substantially uniform thickness in the three segments.
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King Roy V.
TRW Inc.
Yatsko Michael S.
LandOfFree
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