In-situ coat, bake and cure of dielectric material processing sy

Details In-situ coat, bake and cure of dielectric material processing sy In-situ coat, bake and cure of dielectric material processing sy

1994-09-20

1998-01-06

Bell, Janyce

Coating processes

Direct application of electrical, magnetic, wave, or...

Polymerization of coating utilizing direct application of...

427240, 4273855, 427498, 427508, 427521, 427542, 437231, C08J 704, B05D 312

Patent

active

057052328

ABSTRACT:
This is a system and method of in-situ coating, baking and curing of dielectric material. The system may include: dispensing apparatus for dispensing spin-on material; a lamp module 50; a window 54 connected to the lamp module 50; an environmental control chamber 56 connected to the window 54; an access gate 60 for wafers 58 in the environmental control chamber 56; a spin chuck 62 inside the environmental control chamber 56; and an exhaust pipe 64 connected to the environmental control chamber 56. The lamp module 50 may contains infra red and ultra violet lamps. In addition, the coating chamber may process dielectric material such as spin-on glass, silicon dioxide and various other spin-on material.

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patent: 5376408 (1994-12-01), Lippert
patent: 5444217 (1995-08-01), Moore et al.

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