In-plane magnetoresistance bridge

Electrical resistors – Resistance value responsive to a condition – Magnetic field or compass

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338324, H01L 4300

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active

060754370

ABSTRACT:
A magnetic field sensor device is disclosed comprising two substantially identical n-doped, high carrier mobility semiconductor films (e.g., InSb films) each containing a pattern of cylindrical holes or antidots that cause the resistance of the respective films to vary depending upon the direction of the in-plane component of an applied magnetic field.

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Bergman et al, "Strong-Field Magnetoresistance Anisotropy in Thin Composite Films with a Periodic Microstructure," Physical Review B, vol. 51, No. 19, May 15, 1995, pp. 13845-13 848.
Strelniker et al, "Interference of Current Distortion Patterns and Magnetoresistance Anisotropy in a Composite with Periodic Microstructure," Physical Review B, vol. 53, No. 15, Apr. 15, 1996, pp. 1-9.
Strelniker et al, "Theory of Magnetotransport in a Composite Medium with Periodic Microstructure for Arbitrary Magnetic Fields," Physical Review B, vol. 50, No. 19, Nov. 15, 1994, pp. 14 001-14 015.
Tornow et al, "Anisotropic Magnetoresistance of a Classical Antidot Array," Physical Review Letters, vol. 77, No. 1, Jul. 1 1996, pp. 147-150.

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