In-line type fluid pressure sensor

Details In-line type fluid pressure sensor In-line type fluid pressure sensor

2006-09-05

2006-09-05

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07100454

ABSTRACT:
In an in-line type fluid pressure sensor for determining the fluid pressure in flow of a fluid circulated through a fluid flow circuit employed in a semiconductor manufacturing apparatus, an inner wall surface located particularly in a downstream side connection port (6) of a body member (1) of the sensor is moderately inclined in contour in longitudinal section, which makes it possible for the fluid to flow through a fluid introduction portion (9a) of the body member (1) in a smooth manner without standing in flow in the fluid introduction portion (9a). Due to this, in such a fluid introduction portion (9a), there is not any fear of occurrence of the fluid flow standing phenomenon or problem at all. This makes it possible for the in-line type fluid pressure sensor to realize a precise measurement of the fluid pressure in flow of the fluid circulated through the fluid flow circuit.

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