In-line mask cleaning system

Details In-line mask cleaning system In-line mask cleaning system

1982-12-22

1984-11-20

Moore, Chris K.

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

15303, 15310, 15312R, B08B 302, B08B 502

Patent

active

044830408

ABSTRACT:
A system for cleaning material from a surface of an object, such as an MLC mask, having movable support member having extended along its length a line of liquid dispensing nozzles and a line of gas dispensing ports for respectively cleaning and drying the surface. The liquid dispensing nozzles and said gas dispensing ports are arranged to respectively provide a continuous line of liquid spray and a continuous line of gas at an angle with respect to the surface so as to form a wedge therewith in the direction of motion of the movable support member. The nozzles and ports are preferably arranged on both sides of the object to simultaneously clean both sides. The support member is moved vertically with respect to the surface by an air cylinder. The vertical movement of the respective lines of nozzles and ports so that said liquid dispensing nozzles act to provide said continuous line of liquid spray to remove said material from said surface when said line of spray is moved vertically across said surface and said gas dispensing ports subsequently act to provide said continuous line of gas to remove the liquid from the surface when the line of gas is moved vertically across the surface. The material and liquid are deposited below the surface for collection and removal.

REFERENCES:
patent: 1644384 (1927-10-01), Kendall
patent: 2566142 (1951-08-01), Powers
patent: 3653425 (1972-04-01), Elliot et al.
patent: 3736618 (1973-06-01), Ramsey
patent: 3942213 (1976-03-01), Hoener
patent: 4244078 (1981-01-01), Hughes et al.

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