In-line gas purity monitoring and control system

Details In-line gas purity monitoring and control system In-line gas purity monitoring and control system

2005-02-04

2008-10-21

Lee, Kevin L (Department: 3753)

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

C137S088000, C137S093000, C073S031030, C429S006000

Reexamination Certificate

active

07438079

ABSTRACT:
Method for supplying a high purity gas product comprising providing a first gas stream including a major component and at least one impurity component, determining the concentration of the at least one impurity component, and comparing the concentration so determined with a reference concentration for that component. When the value of the concentration so determined is less than or equal to the reference concentration, the first gas stream is utilized to provide the high purity gas product. When the value of the concentration so determined is greater than the reference concentration, a second gas stream comprising the major component is provided and the first and second gas streams are mixed to yield a mixed gas stream having a concentration of the at least one impurity component that is less than the reference concentration. The mixed gas stream is utilized to provide the high purity gas product.

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