In-line detector system for real-time determination of impurity

Details In-line detector system for real-time determination of impurity In-line detector system for real-time determination of impurity

1992-08-17

1994-07-05

Warden, Robert J.

Measuring and testing

Gas analysis

Impurity

73 232, 422 83, G01N 2902

Patent

active

053257057

ABSTRACT:
An in-line detector system for real-time detection of impurity concentration in a flowing gas stream. In a specific aspect, the system may comprise a purifier unit for selective purification of gas from the gas stream, and an impurity addition unit for imparting a predetermined concentration of impurity to the gas stream, whereby the resulting concentration sensings of the purified gas, and the impurity-enhanced gas are usefully employed to calibrate an impurity concentration sensor, for continuous accurate sensing of impurity concentration in the flowing gas stream. The system may utilize hygrometric sensors in the case of water as a critical impurity, or surface acoustical wave (SAW) devices coated with suitable impurity-affinity coatings. The system has particular utility in monitoring low impurity concentration levels (e.g., from about 0.1 ppm to about 100 ppm) in gas streams employed in vapor-phase processes such as chemical vapor deposition in the manufacture of semiconductor devices.

REFERENCES:
patent: 4960568 (1990-10-01), Matsumoto et al.
patent: 5007283 (1991-04-01), Ambos
patent: 5027642 (1991-07-01), Wen et al.
patent: 5138869 (1992-08-01), Tom
"System 1/O.sub.2 Microprocessor-Based Moisture and Oxygen Content Analyzer", Panametrics, Ltd. (Shannon, Ireland), Mar., 1990.
M Series/Aluminum Oxide Moisture Sensor for Gases and Liquids, Panametrics, Ltd. Shannon, Ireland, February, 1990.
System 3A Hygrometer, Panametrics, Ltd., Shannon, Ireland, Dec., 1988.

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