In-line cell for absorption spectroscopy

Details In-line cell for absorption spectroscopy In-line cell for absorption spectroscopy

1997-07-10

1999-09-07

Font, Frank G.

Optics: measuring and testing

Sample, specimen, or standard holder or support

Fluid containers

G01N 110

Patent

active

059495375

ABSTRACT:
Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.

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