In-line cell for absorption spectroscopy

Details In-line cell for absorption spectroscopy In-line cell for absorption spectroscopy

1998-07-13

2000-07-04

Font, Frank G.

Optics: measuring and testing

Sample, specimen, or standard holder or support

Fluid containers

G01N 110

Patent

active

060846682

ABSTRACT:
Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light transmissive window in the light entry port and/or said light exit port is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor manufacturing in a semiconductor processing tool.

REFERENCES:
patent: 4990780 (1991-02-01), Lee et al.
patent: 5949537 (1999-09-01), Inman et al.
White, "Long Optical Paths of Large Aperture," J. Opt. Soc. Am., vol. 32 (1942), pp. 285-288.
T.A. HU et al, "Improved Multipass Optics for Diode Laser Spectroscopy," Review of Scientific Instruments, vol. 64, No. 12, Dec. 1993, pp. 3380-3383.
Patent Abstracts of Japan, vol. 6, No. 59, JP 57-1953, Jan. 1982.
Fried et al, "Versatile Integrated Tunable Diode Laser System for High Precision: Application for Ambient Measurements of OCS," Applied Optics, vol. 30, No. 15, May 20, 1991, pp. 1916-1932.
May, "Correlation-Based Technique for Automated Tunable Diode Laser Scan Stabilization," Rev. Sci. Instrum., vol. 63, No. 5, May 1992, pp. 2922-2926.
Eng et al., "Tunable Diode Laser Spectroscopy: An Invited Review," Optical Engineering, Nov.,/Dec. 1980, vol. 19, No. 6, pp. 945-960.
Lundqvist et al, "Measurements of Pressure-Broadening Coefficients of NO and O.sub.3 Using a Computerized Tunable Diode Laser Spectrometer," Applied Optics, vol. 21, No. 17, Sep. 1, 1982, pp. 3109-3113.
Ahlberg et al, "IR-Laser Spectroscopy for Measurement Applications in the Industrial Environment," TR 85170, Dec. 85.
HOJER et al, "Measurements of Electric Field Strength in Gas Insulated High-Voltage Components Using Infrared Diode Laser Absorption Spectroscopy," Applied Optics, vol. 25, No. 17, Sep. 1, 1986; pp. 2984-2987.
Cassidy, "Trace Gas Detection Using 1.3 .mu.m InGaAsP Diode Laser Transmitter Modules," Applied Optics, vol. 27, No. 3, Feb. 1, 1988, pp. 610-614.
Mitsui et al, "Development of New APIMS for the Detection of Trace Impurities in Special Gases," Proceedings of the 40th Annual Technical Meeting of the IES, Chicago, pp. 246-253 (1994).
Herriott et al, "Folded Optical Delay Lines," Applied Optics, vol. 4, No. 8, pp. 883-889 (Aug. 1965).
Schaeffer et al, "Multipass absorption cell designed for high temperature UHV operation," Applied Optics, vol. 28, No. 9, May 1989.

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