Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent
1993-11-30
1995-10-24
Bushey, C. Scott
Gas separation
With nonliquid cleaning means for separating media
Solid agent cleaning member movingly contacts apparatus
55228, 55256, 552571, 55267, 55270, 55467, 95 94, 95186, 95226, 96134, 96181, B01D 1900
Patent
active
054606365
ABSTRACT:
An impurity scavenging system which scavenges impurities of off-gases discharged from a clean room of a production line for semiconductors. The impurity scavenging system has a gas introduction line through which gas to be processed (hereinafter referred as GSP) is discharged, a scavenging unit which stores scavenging liquid, a condenser for condensing vaporized liquid from the scavenging unit, a first pump which pumps the GSP of a discharging line connected with the downstream side of the condenser, a liquid source, a cleaning liquid line which connects the discharging line to a drain and a first valve having ports, including a first port connected with the condenser, a second port connected with the first pump, and a third port connected with one end of the cleaning line another end of which is connected to the drain, thereby selectively enabling a connection from the condenser to the first pump and a connection from the condenser to the cleaning line.
REFERENCES:
patent: 2199797 (1940-05-01), Hunter
patent: 3335548 (1967-08-01), Harmon et al.
patent: 3456428 (1969-07-01), Bichet et al.
patent: 3581473 (1971-06-01), Ririe, Jr.
patent: 3616611 (1971-11-01), Gentili
patent: 4155977 (1979-05-01), Baker
Harada Hiroyuki
Iwata Terufumi
Koinuma Tsutomu
Nitta Michio
Bushey C. Scott
Mitsubishi Corporation
Tokico Ltd.
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