Impurity free reference grid for use charged partiole beam spect

Details Impurity free reference grid for use charged partiole beam spect Impurity free reference grid for use charged partiole beam spect

1992-06-25

1994-08-09

Berman, Jack I.

Radiant energy

Radiation controlling means

250309, 2502521, 250288R, G01N 2300

Patent

active

053368959

ABSTRACT:
A reference grid for use in charged particle beam spectroscopes in analyzing an impurity contained in a target sample, which includes a grid composed of a material free of the impurity.

REFERENCES:
patent: 4163900 (1979-08-01), Warren et al.
patent: 4694170 (1987-09-01), Slodzian et al.
patent: 4818873 (1989-04-01), Herriot
patent: 5043586 (1991-08-01), Giuffre et al.
patent: 5233191 (1993-08-01), Noguchi et al.
J. Vac. Sci. Technol., Part A, vol. 8, No. 3, Jun. 1990, pp. 2209-2212, Mantus et al., "Chemical Imaging Using Ion Microscopy & Digital Image Processing".
J. Vac. Sci. Technol., Part B, vol. 7, No. 2, Apr. 1989, N.Y. pp. 181-187, Harriott et al. "Focused Ion Beam Secondary Ion Mass Spectrometry: Ion Images and End-Point Detection".

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