Improvements in contrast of a positive polymer resist having a g

Details Improvements in contrast of a positive polymer resist having a g Improvements in contrast of a positive polymer resist having a g

1985-07-31

1986-08-05

Childs, Sadie L.

Coating processes

With post-treatment of coating or coating material

Heating or drying

430327, 430330, 430347, B05D 302

Patent

active

046043055

ABSTRACT:
The present invention is a method to increase the contrast of a positive polymer resist by control of molecular weight distribution and prebake temperature. The contrast of a positive polymer resist is increased by baking a narrow molecular weight fraction resist above the glass transition temperature. More particularly the contrast is increased by the use of low average molecular weight resist of narrow molecular weight distribution.

REFERENCES:
patent: 3535137 (1970-10-01), Haller et al.
patent: 3827908 (1974-08-01), Johnson et al.
patent: 3894163 (1975-07-01), Broyde
patent: 4078098 (1978-03-01), Cortellino
patent: 4087569 (1978-05-01), Hatzakis

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