Optical waveguides – Integrated optical circuit
Patent
1991-03-15
1992-04-07
Lee, John D.
Optical waveguides
Integrated optical circuit
385 31, 385 38, G02B 612
Patent
active
051034930
ABSTRACT:
A method, and device produced therewith, for improving the planarity of etched mirror facets 18 of integrated optic structures with non-planar stripe waveguides, such as ridge or groove diode lasers or passive devices such as modulators and switches. The curvature of the mirror facet surface at the edges of the waveguide due to topographical, lithographical and etch process effects, causes detrimental phase distortions, and is avoided by widening the waveguide end near the mirror surface thereby shifting the curved facet regions away from the light mode region to surface regions where curvature is not critical.
REFERENCES:
patent: 4725112 (1988-02-01), Bridges et al.
patent: 4773720 (1988-09-01), Hammer
patent: 4815084 (1989-03-01), Scifres et al.
patent: 4886538 (1989-12-01), Mahapatra
patent: 4952015 (1990-08-01), Van Ruyven
Buchmann Peter L.
Vettiger Peter
Voegeli Otto
Webb David J.
Barns Stephen W.
Boles Donald M.
Lee John D.
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