Improved method of fabricating antifuses in an integrated circui

Details Improved method of fabricating antifuses in an integrated circui Improved method of fabricating antifuses in an integrated circui

1991-10-24

1994-06-21

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437190, 437192, 437922, H01L 2170, H01L 2700

Patent

active

053228120

ABSTRACT:
Various improvements in the fabrication of an antifuse having silicon-amorphous silicon-metal layer structure are presented. Included are improved deposition techniques for the amorphous silicon layer. The improvements include steps for the fabrication of such an antifuse without the use of platinum and the resulting antifuse and contact structures.

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Wolf et al. "Silicon Processing for the VLSI Era" published by Lathz Press, 1986, vol. 1, pp. 394-405.

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