Imprinting polymer film on patterned substrate

Details Imprinting polymer film on patterned substrate Imprinting polymer film on patterned substrate

2004-05-20

2009-11-17

Tucker, Philip C (Department: 1791)

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

C156S230000, C156S232000, C156S247000, C216S013000, C427S074000, C427S152000, C438S738000, C438S782000

Reexamination Certificate

active

07618510

ABSTRACT:
A method of applying a pattern on a topography includes first applying a polymer film to an elastomer member, such as PDMS, to form a pad. The pad is then applied to a substrate having a varying topography under pressure. The polymer film is transferred to the substrate due to the plastic deformation of the polymer film under pressure compared to the elastic deformation of the PDMS member. Thus, upon removal of the pad from the substrate, the PDMS member pulls away from the polymer layer, thereby depositing the polymer layer upon the substrate.

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