Imprinting method and stamper

Details Imprinting method and stamper Imprinting method and stamper

2009-03-27

2010-11-16

Nguyen, Khanh (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

Mechanical shaping or molding to form or reform shaped article

Deforming the surface only

C264S284000, C264S334000, C425S440000

Reexamination Certificate

active

07833458

ABSTRACT:
According to one embodiment, an imprinting method includes applying a resist to a substrate, imprinting a stamper on which protruded patterns are formed against the resist applied to the substrate, forcing a distal end of a peeling wedge into a part between the substrate and the stamper, and introducing a gas between the substrate and the stamper to peel off the stamper from the substrate, in which a gap between the substrate and the stamper is made larger than a thickness of the resist at a part into which the distal end of the peeling wedge is forced.

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Final Notice of Rejection mailed by Japan Patent Office on Nov. 10, 2010 in the corresponding Japanese patent application No. 2008-087763.
Explanation of Non-English Language Reference(s).

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