Imprinting lithography using the liquid/solid transition of...

Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized

Reexamination Certificate

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C438S691000, C438S700000, C438S735000

Reexamination Certificate

active

07141275

ABSTRACT:
A method is provided for imprinting a pattern having nanoscale features from a mold into the patternable layer on a substrate. The method comprises: providing the mold; forming the patternable layer on the substrate; and imprinting the mold into the patternable layer, wherein the patternable layer comprises a metal or alloy having a transition temperature from its solid form to its liquid form that is within a range of at least 10° above room temperature.

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C.J. Martin, Prediction of fabrication distortions in step and flash imprint lithography templates, vol. 20, No. 6, Nov./Dec. 2002, pp. 2891-2895.
Price, D. “A New Method of Embossing Paper, Boards, Leather, Tin, and Like Substances” GB 17,969- Jun. 4, 1989.
Chou, S et al; “Imprint Lithography With 25-Nanometer Resolution” - Science vol. 272- Apr. 5, 1996- pp. 85-87.

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