Imprinting apparatus with independently actuating separable...

Details Imprinting apparatus with independently actuating separable... Imprinting apparatus with independently actuating separable...

2007-04-10

2007-04-10

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S040000, C355S075000

Reexamination Certificate

active

10919806

ABSTRACT:
An imprinting apparatus including a plate unit, and a plurality of imprinting modules provided on a lower surface of the plate unit. Each imprinting module is self-aligned by a compliance of six degree of freedom and vertically moved along with the plate unit by a controller. The imprint module is independently self-aligned in response to surface conditions of an objective material to compensate for a relative pose error thereof, such that a pattern formed on a lower end of the imprinting module can be imprinted on an upper surface of the objective material within a predetermined unit range, and a sequence of imprinting the pattern of the imprinting module on the objective material can be variously controlled.

REFERENCES:
patent: 4004506 (1977-01-01), McInerny
patent: 4793785 (1988-12-01), Osada
patent: 6954275 (2005-10-01), Choi et al.
patent: 2004/0141168 (2004-07-01), Sreenivasan et al.
patent: 2006/0019504 (2006-01-01), Taussig
patent: 2006/0032437 (2006-02-01), McMackin et al.
patent: 20040086183 (2004-10-01), None

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