Imprint system and imprint method

Details Imprint system and imprint method Imprint system and imprint method

2008-09-25

2010-12-21

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S051000, C700S204000, C977S887000, C425S375000, C264S319000

Reexamination Certificate

active

07856288

ABSTRACT:
An imprint system has a design data storing section which stores template information and remaining film thickness set value information, a vaporization-to-be-compensated storing section which stores a plurality of distributions of applied amounts for compensating vaporization, an arithmetic section which calculates a distribution of an applied amount for filling a pattern based upon the template information, calculates a distribution of an applied amount for forming a remaining film thickness based upon said remaining film thickness set value information, calculates a pattern density of the template from the template information, extracts a distribution of an applied amount for compensating vaporization, corresponding to this pattern density, from the vaporization-to-be-compensated storing section, and adds up this extracted distribution of an applied amount for compensating vaporization, the distribution of an applied amount for filling a pattern, and the distribution of an applied amount for forming a remaining film thickness, to calculate a distribution of an applied amount of the imprint member, and an application section which applies the imprint member on the substrate based upon the distribution of an applied amount of the imprint member.

REFERENCES:
patent: 2006/0196377 (2006-09-01), Loopstra et al.
patent: 2007/0228593 (2007-10-01), Jones et al.
patent: 2007/0278712 (2007-12-01), Okushima et al.
patent: 2008/0090170 (2008-04-01), Yoneda
patent: 2007-296783 (2007-11-01), None

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