Imprint stamp comprising cyclic olefin copolymer

Details Imprint stamp comprising cyclic olefin copolymer Imprint stamp comprising cyclic olefin copolymer

2006-06-12

2010-12-21

Nguyen, Khanh (Department: 1742)

Plastic and nonmetallic article shaping or treating: processes

With step of making mold or mold shaping, per se

Utilizing surface to be reproduced as an impression pattern

C264S220000, C264S320000, C264S496000, C264S239000, C264S299000, C264S219000

Reexamination Certificate

active

07854873

ABSTRACT:
A method is provided for transferring a pattern from a template (1) to an object (12) in an imprint process, using a two-step process. The first step includes contacting a pattern of the template surface with a polymer material comprising one or more Cyclic Olefin Copolymers (COCs), to produce a flexible polymer replica having a structured surface with an inverse of the pattern of the template surface. In a second step, after releasing the flexible polymer replica from the template, the inverse pattern of the flexible polymer replica is pressed into a resist layer on a substrate, to imprint a replica of the pattern of the template surface in therein.

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