Imprint manufacture method

Details Imprint manufacture method Imprint manufacture method

2004-01-07

2010-06-15

Vargot, Mathieu D. (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

Utilizing special inert gaseous atmosphere or flushing mold...

C264S002700, C264S322000, C528S480000

Reexamination Certificate

active

07736558

ABSTRACT:
Provided is an imprint method that includes the steps of softening resist in an object to be processed, by using compressed gas or supercritical fluid, the object including a substrate and the resist applied onto the substrate, and transferring a predetermined pattern onto the resist by pressing a mold that forms the predetermined pattern against the resist in the object.

REFERENCES:
patent: 4990595 (1991-02-01), Traechkner et al.
patent: 5766637 (1998-06-01), Shine et al.
patent: 5772905 (1998-06-01), Chou
patent: 6676867 (2004-01-01), Tsuchiya et al.
patent: 6814898 (2004-11-01), Deeman et al.
patent: 6977108 (2005-12-01), Hieda et al.
patent: 2-105819 (1990-04-01), None
patent: 2000-511110 (2000-08-01), None
patent: 2001-250217 (2001-09-01), None
patent: 2002-184718 (2002-06-01), None
patent: 2002-270540 (2002-09-01), None
patent: 2002-279616 (2002-09-01), None
patent: 2002-320929 (2002-11-01), None
patent: 2002-324777 (2002-11-01), None

Affiliated with

Also associated with

Rating

Imprint manufacture method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Imprint manufacture method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Imprint manufacture method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4244638