Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2005-01-11
2005-01-11
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S072000
Reexamination Certificate
active
06842229
ABSTRACT:
A system of determining and correcting alignment during imprint lithography process is described. During an imprint lithographic process the template may be aligned with the substrate by the use of alignment marks disposed on both the template and substrate. The alignment may be determined and corrected for before the layer is processed.
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Bailey Todd
Choi Byung J.
Colburn Matthew
Sreenivasan Sidlgata V.
Brooks Kenneth C.
Kim Peter B.
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