Imprint lithography including alignment

Details Imprint lithography including alignment Imprint lithography including alignment

2005-05-31

2008-09-02

Culler, Jill E. (Department: 2854)

Printing

Processes

Position or alignment

C425S385000, C430S022000

Reexamination Certificate

active

07418902

ABSTRACT:
An imprint lithography apparatus is disclosed that has a substrate table configured to hold a substrate, a template holder configured to hold an imprint template, the imprint template or the template holder having a template alignment mark configured to be imprinted onto the substrate table or onto a substrate to form an imprinted alignment mark, the imprint template having a functional pattern, and the template alignment mark and the functional pattern having a known spatial relationship, and an alignment sensor configured to determine the location of the imprinted alignment mark.

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