Imprint lithography for superconductor devices

Details Imprint lithography for superconductor devices Imprint lithography for superconductor devices

2005-08-09

2005-08-09

Talbot, Brian K. (Department: 1762)

Coating processes

Electrical product produced

Superconductor

C029S599000, C505S329000, C505S410000, C505S471000, C505S702000

Reexamination Certificate

active

06926921

ABSTRACT:
One aspect of this disclosure relates to a method of building a superconductor device on a substrate, comprising depositing an imprint layer on at least a portion of the substrate. The imprint layer is imprinted to provide an imprinted portion of the imprint layer and a non-imprinted portion of the imprint layer. A superconductor layer is deposited on at least a portion of the imprinted portion of the imprint layer.

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