Imprint lithography

Details Imprint lithography Imprint lithography

2005-05-16

2008-10-28

Tucker, Philip C (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

By fluid pressure actuated flexible diaphragm

C425S383000, C425S387100, C425S810000, C425S117000

Reexamination Certificate

active

07442029

ABSTRACT:
An imprint lithography apparatus is disclosed which has a needle, and a substrate table arranged to hold a substrate to be imprinted, wherein the needle is moveable between a first position and a second position, the first position being such that in use the needle penetrates a layer of imprintable material on the substrate, and the second position being such that in use the needle is disengaged from the imprintable material on the substrate, the substrate table and the needle arranged such that one may be scanned relative to the other.

REFERENCES:
patent: 674253 (1901-05-01), Arnold
patent: 3703752 (1972-11-01), Schulte
patent: 5094536 (1992-03-01), MacDonald et al.
patent: 5126574 (1992-06-01), Gallagher
patent: 5512131 (1996-04-01), Kumar et al.
patent: 5772905 (1998-06-01), Chou
patent: 5856672 (1999-01-01), Ried
patent: 6165911 (2000-12-01), Calveley
patent: 6218086 (2001-04-01), Binnig et al.
patent: 6309580 (2001-10-01), Chou
patent: 6334856 (2002-01-01), Allen et al.
patent: 6334960 (2002-01-01), Willson et al.
patent: 6365059 (2002-04-01), Pechenik
patent: 6375870 (2002-04-01), Visovsky et al.
patent: 6471903 (2002-10-01), Sherman et al.
patent: 6482742 (2002-11-01), Chou
patent: 6518189 (2003-02-01), Chou
patent: 6558361 (2003-05-01), Yeshurun
patent: 6600162 (2003-07-01), Hahmann et al.
patent: 6656341 (2003-12-01), Petersson et al.
patent: 6663820 (2003-12-01), Arias et al.
patent: 6696220 (2004-02-01), Bailey et al.
patent: 6719915 (2004-04-01), Willson et al.
patent: 6743211 (2004-06-01), Prausnitz et al.
patent: 6835184 (2004-12-01), Sage et al.
patent: 6847433 (2005-01-01), White et al.
patent: 6908453 (2005-06-01), Fleming et al.
patent: 6921615 (2005-07-01), Sreenivasan et al.
patent: 7141808 (2006-11-01), Rangelow et al.
patent: 7166086 (2007-01-01), Haider et al.
patent: 7170589 (2007-01-01), Cherala et al.
patent: 2002/0093122 (2002-07-01), Choi et al.
patent: 2002/0094496 (2002-07-01), Choi et al.
patent: 2002/0132482 (2002-09-01), Chou
patent: 2002/0167117 (2002-11-01), Chou
patent: 2002/0177319 (2002-11-01), Chou
patent: 2003/0022470 (2003-01-01), Liu et al.
patent: 2003/0034329 (2003-02-01), Chou
patent: 2003/0080471 (2003-05-01), Chou
patent: 2003/0080472 (2003-05-01), Chou
patent: 2003/0081193 (2003-05-01), White et al.
patent: 2003/0127580 (2003-07-01), Ling et al.
patent: 2003/0139042 (2003-07-01), Heidari
patent: 2003/0141291 (2003-07-01), Heidari et al.
patent: 2003/0159608 (2003-08-01), Heidari
patent: 2003/0170053 (2003-09-01), Montelius et al.
patent: 2003/0189273 (2003-10-01), Olsson
patent: 2004/0005444 (2004-01-01), Heidari
patent: 2004/0009673 (2004-01-01), Sreenivasan et al.
patent: 2004/0021068 (2004-02-01), Staats
patent: 2004/0021866 (2004-02-01), Watts et al.
patent: 2004/0022888 (2004-02-01), Sreenivasan et al.
patent: 2004/0026007 (2004-02-01), Hubert et al.
patent: 2004/0036201 (2004-02-01), Chou et al.
patent: 2004/0046288 (2004-03-01), Chou
patent: 2004/0081798 (2004-04-01), Lee et al.
patent: 2004/0124566 (2004-07-01), Sreenivasan et al.
patent: 2004/0149367 (2004-08-01), Olsson et al.
patent: 2004/0169003 (2004-09-01), Lee et al.
patent: 2004/0192041 (2004-09-01), Jeong et al.
patent: 2004/0200411 (2004-10-01), Willson et al.
patent: 2004/0209470 (2004-10-01), Bajorek
patent: 2004/0219249 (2004-11-01), Chung et al.
patent: 2004/0219461 (2004-11-01), Chung et al.
patent: 2005/0039618 (2005-02-01), Heidari et al.
patent: 2005/0064054 (2005-03-01), Kasumi
patent: 2005/0255237 (2005-11-01), Zhang et al.
patent: 2005/0263077 (2005-12-01), Subramanian et al.
patent: 1 953 494 (1970-12-01), None
patent: 0 376 045 (1990-07-01), None
patent: 190001523 (1900-04-01), None
patent: WO 01/79591 (2001-10-01), None
patent: WO 01/79592 (2001-10-01), None
patent: 02/091041 (2002-11-01), None
patent: WO 3081171 (2003-10-01), None
Pozidis et al., Demostration of Thermomechanical Recording at 641 Gbit/in2, Jul. 2004, IEEE Transaction on Magnetics, vol. 40, No. 4, pp. 2531-2536.
Stephen Y. Chou, et al., “Nanoimprint Lithography”, J. Vac. Sci. Technol. B 14(6), Nov./Dec. 1996, pp. 4129-4133.
European Search Report dated Nov. 26, 2007 corresponding Application No. EP 06 25 2374.
Nelson B A et al.: “Transport in Thermal Dip Pen Nanolithography” Proceedings of Nano. Integrated Nanosystems: Design, Synthesis and Applications, ASME, US, Sep. 22, 2004, pp. 125-126, XP008074369.

Affiliated with

Also associated with

Rating

Imprint lithography does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Imprint lithography, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Imprint lithography will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4001360