Imprint lithography

Details Imprint lithography Imprint lithography

2011-04-12

2011-04-12

Gupta, Yogendra N (Department: 1744)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C425S389000, C425S405100, C977S887000

Reexamination Certificate

active

07922474

ABSTRACT:
An imprinting method is disclosed that includes applying an imprinting force to a template to cause the template to contact an imprintable medium on a target region of a first surface of a substrate to form an imprint in the medium, during application of the imprinting force, applying a compensating force to a second surface of the substrate which is opposite to the first surface so as to reduce deformation of the substrate caused by the application of the imprinting force, and separating the template from the imprinted medium.

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English translation of Official Action issued on Mar. 11, 2009 in Japanese Application No. 2006-039322.

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