Imprint lithography

Details Imprint lithography Imprint lithography

2005-04-19

2009-11-03

Gupta, Yogendra (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C425S387100, C425SDIG019, C264S319000

Reexamination Certificate

active

07611348

ABSTRACT:
An imprint lithography apparatus is disclosed that has a template holder configured to hold an imprint template and a substrate table, the template holder having a gas bearing configured to supply gas via a high pressure channel and to control a separation distance between the imprint template and a substrate held on the substrate table.

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English translation of Official Action issued on Apr. 28, 2009 in Japanese Application No. 2006-114629.

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