Imprint lithography

Details Imprint lithography Imprint lithography

2004-12-30

2009-02-17

Evanisko, Leslie J (Department: 2854)

Printing

Planographic

Lithographic plate making, and processes of making or using...

C101S483000, C101S488000, C101S453000, C430S049100, C430S049400, C216S044000, C216S052000

Reexamination Certificate

active

07490547

ABSTRACT:
An imprinting method is provided that, according to an embodiment, involves contacting an imprintable medium on a substrate with a template to define an imprint area in the medium, removing at least some of any imprintable medium present outside the imprint area, and separating the template from the medium.

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Stephen Y. Chou, et al., “Nanoimprint Lithography”, J. Vac. Sci. Technol. B 14(6), Nov./Dec. 1996, pp. 4129-4133.

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