Plastic article or earthenware shaping or treating: apparatus – Control means responsive to or actuated by means sensing or... – Mold motion or position control
Reexamination Certificate
2011-04-19
2011-04-19
Ewald, Maria Veronica D (Department: 1744)
Plastic article or earthenware shaping or treating: apparatus
Control means responsive to or actuated by means sensing or...
Mold motion or position control
C425S174400, C425S385000, C264S293000, C356S400000, C356S620000
Reexamination Certificate
active
07927090
ABSTRACT:
An imprint lithography apparatus is disclosed, the apparatus including a substrate table arranged to support a substrate having a first surface to be imprinted and a second surface, facing the substrate table, comprising a substrate alignment mark, a template holder arranged to hold a template to imprint the first surface of the substrate, and an alignment system arranged to align the template to a substrate alignment mark provided on the substrate, wherein the substrate table further comprises a substrate table optical system to allow the substrate alignment mark to be viewed by the alignment system.
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ASML Netherlands B.V.
D Ewald Maria Veronica
Pillsbury Winthrop Shaw & Pittman LLP
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