Imprint apparatus and method for imprinting

Printing – Processes

Reexamination Certificate

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Details

C101S363000, C977S877000, C977S888000

Reexamination Certificate

active

07343857

ABSTRACT:
An imprint apparatus configured such that it can press a laminate structure in which a magnetic film and a resist film are sequentially laminated on a substrate. The imprint apparatus includes a first press plate configured to mount the laminate structure, a second press plate adapted for sandwiching the laminate structure, a stamper placed on a surface of the second press plate, and has projections and recesses configured to be transferred onto the resist film, and a light source configured to dispose on the same plane as the laminate structure, and is oriented so that the light source can shine the resist film.

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patent: WO 03/031096 (2003-04-01), None

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