Imprint apparatus and imprint method

Details Imprint apparatus and imprint method Imprint apparatus and imprint method

2005-03-22

2008-08-19

Colilla, Daniel J. (Department: 2854)

Printing

Printing members

C101S483000, C101S463100

Reexamination Certificate

active

07412926

ABSTRACT:
It is possible to perform even pattern transfer with a high throughput. An imprint apparatus includes: a first press plate having a first press face on which a substrate to be transferred; a second press plate having a second press face opposed to the first press face, which is arranged such that the second press face presses a face of an imprint stamper which is opposed from a face thereof on which a concave and convex pattern is formed; a pressure applying unit which applies a pressure on a face of the second press plate which is opposed from the second press face; a first supporting member which supports a face of the first press plate which is opposed from the first press face and has a section equal to or smaller than a bottom face of the substrate in size; and a frame structure which has a second supporting member supporting the first supporting member, a third supporting member supporting the pressure applying unit, and coupling members coupling respective both ends of the second supporting member and the third supporting member.

REFERENCES:
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www.dictionary.com; no date.
U.S. Appl. No. 11/085,533, filed Mar. 22, 2005, Sakurai et al.
U.S. Appl. No. 11/192,048, filed Jul. 29, 2005, Okino et al.

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