Implantation of vaporized material on melted substrates

Details Implantation of vaporized material on melted substrates Implantation of vaporized material on melted substrates

1980-05-12

1981-07-28

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 531, 219121EE, 219121EF, 219121LE, 219121LF, 219121LM, C23C 1300, C23C 1312

Patent

active

042810302

ABSTRACT:
Implantation of a particle flux (200), for example a laser produced particle flux, upon a substrate (5) is enhanced by premelting the substrate surface with a beam of radiation (110) from a pulsed high energy source (2) such as a laser source. The premelting is provided prior to the arrival of the particle flux in order that the particle flux impinge upon an area of the substrate which is melted.

REFERENCES:
patent: 3560252 (1971-02-01), Kennedy
patent: 4108751 (1978-08-01), King
patent: 4214015 (1980-07-01), Stephan
Nichols, "Brit. Comm. and Electronics", vol. 12, pp. 368-369, Jun. 1965.
Hass et al., "Applied Optics", vol. 8, No. 6, pp. 1115-1118, Jun. 1969.
Agarwal et al., "J. Vac. Sci. Tech.", vol. 12, No. 2, pp. 619-623, Mar. 1975.
Greenwald et al., "Solid State Tech.", Apr. 1979, pp. 143-148.
"Laser Focus", May 1979, pp. 34 and 36.
Auston et al., "Appl. Phys. Lett.", vol. 34, No. 11, pp. 777-779, Jun. 1979.
Hanabusa et al., "Appl. Phys. Lett.", vol. 35, No. 8, pp. 626-627, Oct. 1979.
Ota, "J. Appl. Phys.", vol. 51, No. 2, pp. 1102-1110, Feb. 1980.
Takei et al., "J. Appl. Phys.", vol. 51, No. 5, pp. 2903-2908, May 1980.

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