Implantation of electrical feed-through conductors

Details Implantation of electrical feed-through conductors Implantation of electrical feed-through conductors

1981-07-21

1983-01-11

Tufariello, T.

Chemistry: electrical and wave energy

Processes and products

204 24, 204273, C25D 502, C25D 704

Patent

active

043681069

ABSTRACT:
Electrically conductive solid, dense feed-through paths for the high-speed low-loss transfer of electrical signals between integrated circuits of a single silicon-on-sapphire body, or between integrated circuits of several silicon-on-sapphire bodies, are provided by an electroforming method.

REFERENCES:
patent: 2682501 (1954-06-01), Teal
patent: 3259049 (1966-07-01), Uithoven
patent: 3301939 (1967-01-01), Krasnow
patent: 3483095 (1969-12-01), Bean
patent: 3654097 (1972-04-01), Degnan
patent: 3798136 (1974-03-01), Olsen

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