Implantation of an insulative layer

Details Implantation of an insulative layer Implantation of an insulative layer

1982-09-17

1984-08-21

Roy, Upendra

Metal treatment

Compositions

Heat treating

29576B, 204192D, 204192N, 357 91, 427 38, H01L 700

Patent

active

044668392

ABSTRACT:
Method for preparing electrically conductive layers on or in insulating layers, characterized by the feature that the conductivity of at least part of the insulating layer is increased by ion implantation.

REFERENCES:
patent: 3328210 (1967-06-01), McCaldin et al.
patent: 3799813 (1974-03-01), Danchenko
patent: 3818413 (1974-06-01), Krimmel
patent: 4001049 (1977-01-01), Baglin et al.
patent: 4047974 (1977-09-01), Harari
patent: 4081292 (1978-03-01), Aoki et al.
patent: 4162176 (1979-07-01), Tsuda
patent: 4197144 (1980-04-01), Kirkpatrick et al.
patent: 4258077 (1981-03-01), Mori et al.
patent: 4297782 (1981-11-01), Ito
patent: 4395547 (1983-07-01), Vossen, Jr. et al.
Young et al., Jour. Electronic Materials, 6, (1977), 569.

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