Implantation method having improved material purity

Details Implantation method having improved material purity Implantation method having improved material purity

1992-09-22

1994-10-11

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437 30, 437 36, 437944, H01L 21265

Patent

active

053546970

ABSTRACT:
A method of manufacturing a device, preferably a semiconductor device, whereby a mask (3) with an opening (4) extending down to a bare body (1) is provided on a surface (2) of this body (1), after which a substance (5) is implanted into the body (1) through the opening (4), upon which the mask (3) is removed. The mask (3) is provided by depositing a first and a second layer (6, 7, respectively) on the surface (2), and these layers are provided with the opening (4), while the first layer (6) can be selectively removed relative to the material of the body (1), and the second layer (7) is of the same material as the body (1). Since the same material is used for the second layer (7) as for the body (1), the body (1) is not polluted with material from the mask (3) in the opening (4) during implantation.

REFERENCES:
patent: 4084987 (1978-04-01), Godber
patent: 4755477 (1988-07-01), Chao
patent: 5093280 (1991-03-01), Tully
patent: 5132241 (1992-07-01), Su

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