Implantable mechanical pressure sensor and method of...

Measuring and testing – Fluid pressure gauge

Reexamination Certificate

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C600S486000

Reexamination Certificate

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11148124

ABSTRACT:
A biocompatible, mechanical, micromachined pressure sensor and methods of manufacturing such a pressure sensor are provided. The pressure sensor of the current invention includes a high-aspect-ratio curved-tube structure fabricated through a one-layer parylene process. The pressure sensor of the current invention requires zero power consumption and indicates the pressure variation by changes of the in situ in-plane motion of the sensor, which can be gauged externally by a direct and convenient optical observation. In one embodiment, the pressure sensor of the current invention has been shown to work as an IOP sensor for eye implantation where the intraocular in-plane motion of the sensor can be recorded from outside of the eye, such that the intraocular pressure in glaucoma patients can be constantly monitored.

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Yao, “Parylene for MEMS Applications”, Thesis Chapter 2 entitled Parylene as a MEMS Material, 2002, pp. 23-75.

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