Implant damaged oxide insulating region in vertical cavity...

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S043010

Reexamination Certificate

active

07095771

ABSTRACT:
Optical transmitters are disclosed, one example of which includes a vertical cavity surface emitting laser that includes a substrate upon which a lower mirror is disposed. In this example, a spacer is disposed between the lower mirror and an active region. Another spacer separates the active region and an upper mirror. The upper mirror includes an oxide insulating region that is damaged by ion implantation so that desirable effects are achieved with respect to lateral sheet resistance, and quantum well recombination centers in the active region.

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