Impermeable cooled closing plug for processing tubes, in particu

Details Impermeable cooled closing plug for processing tubes, in particu Impermeable cooled closing plug for processing tubes, in particu

1980-11-06

1982-03-09

Bernstein, Hiram

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including heat exchanger for reaction chamber or reactants...

422240, 422245, 156DIG83, F28D 2100, B01T 1902

Patent

active

043188893

ABSTRACT:
An impermeable cooled closing plug adapted for closing the end of a semiconductor manufacture processing tube is made of a material selected from the group consisting of quartz, silicon and silicon carbide, which materials have low heat conductivity and high chemical stability. The cooling effects of a cooling liquid supplied to the entrance flange of a processing tube are isolated from the tube closing plug by virtue of the low heat conductivity, thus preventing unwanted condensation effects at the entrance of the tube.

REFERENCES:
patent: 3055741 (1962-09-01), MacInnis et al.
patent: 3578495 (1971-05-01), Pammer et al.
patent: 4162293 (1979-07-01), Zeuch

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