Impedance matching circuit and thin film measuring prober

Wave transmission lines and networks – Coupling networks – With impedance matching

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Details

330 51, 330286, H01P 500

Patent

active

057867372

ABSTRACT:
An impedance matching circuit disposed on one of input and output sides of an element to be evaluated matches I/O impedances of the element. The impedance matching circuit includes a matching substrate having a surface, a main line on the surface, passive circuits having stubs and FETs alternatingly connected in series and electrically connected to the main line to change impedance of the main line, and a plurality of switching FETs connected in series between the main line and the respective passive circuits switched on and off in accordance with characteristics of the element. The impedances of the matching substrate can be changed as required by electrically connecting the passive circuit to the main line by switching of the FETs. Even when a considerable change occurs in the I/O impedances of the element due to fabrication variations and in large signal (non-linear) operation of a power FET, I/O impedances of an evaluating object can be matched easily and promptly by appropriate switching of the FETs.

REFERENCES:
patent: 4929855 (1990-05-01), Ezzeddine
patent: 5159297 (1992-10-01), Tateno
patent: 5202649 (1993-04-01), Kashiwa
patent: 5343172 (1994-08-01), Utsu et al.

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