Impedance matched and thermally cooled deflection amplifiers for

Details Impedance matched and thermally cooled deflection amplifiers for Impedance matched and thermally cooled deflection amplifiers for

1985-06-28

1987-05-19

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

2504922, 250398, H01J 37302

Patent

active

046671080

ABSTRACT:
An improved deflection amplifier interconnection circuit structure for charged particle beam write/read apparatus having a deflector stage wherein the charged particle apparatus is mounted within an evacuated housing by a support member. Transmission line-type printed wiring conductor patterns are provided within the insulating support member which serves as a combined electrical and vacuum feed-thru structure. The transmission line-type printed wiring conductor pattern interconnects the output of a deflector drive amplifier to the deflector element of the charged particle beam apparatus within the evacuated housing. An improved impedance match between the deflector drive amplifier and the deflector element is obtained along with improved cooling capability for the amplifier and elimination of the need for mounting the amplifier within a separate housing remotely located from the evacuated housing for the charged particle apparatus.

REFERENCES:
patent: 3717785 (1973-02-01), Guernet
patent: 4438557 (1984-03-01), Parker et al.

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